Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422743 | Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method | Markus Koch, Dirk Hellweg, Walter Pauls, Grizelda Kersteen, Klaus Gwosch | 2025-09-23 |
| 12372431 | Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured | Markus Koch, Klaus Gwosch, Dmitry Simakov | 2025-07-29 |
| 12288272 | Method for determining a production aerial image of an object to be measured | Martin Dietzel | 2025-04-29 |
| 12174546 | Method for measuring an effect of a wavelength-dependent measuring light reflectivity and an effect of a polarization of measuring light on a measuring light impingement on a lithography mask | Walter Pauls | 2024-12-24 |
| 11796926 | Metrology system for examining objects with EUV measurement light | Klaus Gwosch | 2023-10-24 |
| 11774848 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Hendrik Steigerwald | 2023-10-03 |
| 11079673 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Hendrik Steigerwald | 2021-08-03 |
| 11061331 | Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth | Markus Koch, Dirk Hellweg, Martin Dietzel | 2021-07-13 |
| 10775691 | Method for examining photolithographic masks and mask metrology apparatus for performing the method | Dirk Hellweg, Markus Koch | 2020-09-15 |
| 10564551 | Method for determining a focus position of a lithography mask and metrology system for carrying out such a method | Markus Koch, Dirk Hellweg, Martin Dietzel | 2020-02-18 |
| 10481505 | Method for determining an imaging aberration contribution of an imaging optical unit for measuring lithography masks | Markus Koch, Dirk Hellweg, Martin Dietzel | 2019-11-19 |
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Frederik Blumrich, Anthony Garetto, Thomas Scherübl | 2018-08-21 |