Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774848 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Renzo Capelli | 2023-10-03 |
| 11079673 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Renzo Capelli | 2021-08-03 |