Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422743 | Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method | Renzo Capelli, Markus Koch, Dirk Hellweg, Grizelda Kersteen, Klaus Gwosch | 2025-09-23 |
| 12174546 | Method for measuring an effect of a wavelength-dependent measuring light reflectivity and an effect of a polarization of measuring light on a measuring light impingement on a lithography mask | Renzo Capelli | 2024-12-24 |
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Matthias Manger, Christoph Petri, Pavel Alexeev | 2022-08-16 |
| 10859819 | Method for changing a surface via particle irradiation | Christoph Petri, Sebastian Vauth, Udo Kubon | 2020-12-08 |
| 10551747 | Device for changing a surface shape of an optical element via electron irradiation | Florian Ahles, Martin Weiser | 2020-02-04 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9939730 | Optical assembly | Hendrik Wagner, Florian Ahles, Christian Wald, Steffen Fritzsche, Norbert Wabra +3 more | 2018-04-10 |
| 9709770 | Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +1 more | 2017-07-18 |
| 9470872 | Reflective optical element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schneider, Hendrik Wagner +1 more | 2016-10-18 |
| 4385954 | Method for applying binding agents to fibrous webs | Raymond A. Dunleavy | 1983-05-31 |
| 4348251 | System for applying binding agents to fibrous webs | Raymond A. Dunleavy | 1982-09-07 |
| 4292271 | Methods of applying bonding materials onto fibrous webs | James F. Buob | 1981-09-29 |
| 4202852 | Process for producing colored nonwoven fibrous webs | Fredric N. Miller | 1980-05-13 |