Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500294 | Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method | Daniel Runde, Florian Baumer, Ulrich Mueller | 2022-11-15 |
| 11415892 | Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus | Matthias KAES, Steffen Bezold, Matthias Manger, Pavel Alexeev, Walter Pauls | 2022-08-16 |
| 10859819 | Method for changing a surface via particle irradiation | Walter Pauls, Sebastian Vauth, Udo Kubon | 2020-12-08 |
| 10209620 | Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus | Daniel Runde | 2019-02-19 |
| 9841685 | Determination of a corrected variable | Christian Wald, Daniel Runde | 2017-12-12 |