Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404849 | Micromembrane pumping device | Agnes BUSSMANN, Lorenz GRUENERBEL, Sebastian KIBLER | 2025-09-02 |
| 11555725 | Microstructured fluid flow control device | Sebastian KIBLER, Martin Wackerle, Yuecel Congar | 2023-01-17 |
| 11399978 | Free jet dosage system for the eye | Martin Richter, Axel Wille | 2022-08-02 |
| 11111911 | Degassing apparatus | Martin Richter, Axel Wille, Simone Strohmair | 2021-09-07 |
| 10852642 | Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus | Bjoern Butscher | 2020-12-01 |
| 10845274 | Device having a micro fluid actuator | Martin Richter, Yuecel Congar | 2020-11-24 |
| 10792430 | Free-jet dosing system for applying a fluid into or under the skin | Martin Richter, Martin Wackerle | 2020-10-06 |
| 10254466 | Optical waveguide for guiding illumination light | Stefan Schaff, Markus Deguenther, Daniel Runde | 2019-04-09 |
| 10241423 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller | 2019-03-26 |
| 10135272 | Switched mode power supply circuit | Marc Fahlenkamp, Martin Krueger, Doris Keitel-Schulz, Sergio Rossi | 2018-11-20 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9939730 | Optical assembly | Walter Pauls, Hendrik Wagner, Florian Ahles, Steffen Fritzsche, Norbert Wabra +3 more | 2018-04-10 |
| 9887564 | Switched mode power supply circuit | Marc Fahlenkamp, Martin Krueger, Doris Keitel-Schulz, Sergio Rossi | 2018-02-06 |
| 9841685 | Determination of a corrected variable | Christoph Petri, Daniel Runde | 2017-12-12 |
| 9671548 | Optical waveguide for guiding illumination light | Stefan Schaff, Markus Deguenther, Daniel Runde | 2017-06-06 |
| 9442381 | Method of operating a projection exposure tool for microlithography | Olaf Conradi, Michael Totzeck, Ulrich Loering, Dirk Juergens, Ralf Mueller | 2016-09-13 |