Issued Patents All Time
Showing 1–25 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Sascha Perlitz +2 more | 2024-02-27 |
| 11378887 | Pupil facet mirror, illumination optics and optical system for a projection lithography system | — | 2022-07-05 |
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Jan Horn, Ulrich Bihr, Andy Zott | 2022-03-01 |
| 11061334 | Pupil facet mirror, illumination optics and optical system for a projection lithography system | — | 2021-07-13 |
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Enrico Geissler, Dirk Doering, Lakshmanan Senthil Kumar, Guenter Rudolph +1 more | 2021-05-11 |
| 11003086 | Illumination optical device for projection lithography | Stig Bieling | 2021-05-11 |
| 10948828 | Illumination optical element for projection lithography | Stig Bieling | 2021-03-16 |
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Thaler, Thomas Frank, Ulrich Matejka +2 more | 2020-06-30 |
| 10599041 | Facet mirror | Stig Bieling, Johannes Wangler | 2020-03-24 |
| 10539883 | Illumination system of a microlithographic projection device and method for operating such a system | Vladimir Davydenko, Dirk Juergens, Thomas Korb | 2020-01-21 |
| 10444631 | Method of operating a microlithographic projection apparatus and illumination system of such an apparatus | Johannes Eisenmenger, Stefanie Hilt, Thomas Korb, Frank Schlesener, Manfred Maul | 2019-10-15 |
| 10394129 | Microlithographic illumination unit | Stig Bieling | 2019-08-27 |
| 10281823 | Illumination system of a microlithographic projection exposure apparatus | — | 2019-05-07 |
| 10274828 | Lighting system of a microlithographic projection exposure system and method for operating such a lighting system | Vladimir Davydenko, Thomas Korb, Johannes Eisenmenger | 2019-04-30 |
| 10254466 | Optical waveguide for guiding illumination light | Christian Wald, Stefan Schaff, Daniel Runde | 2019-04-09 |
| 10241416 | Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus | Michael Layh | 2019-03-26 |
| 10216091 | Facet mirror for an illumination optical unit for projection lithography | Michael Patra | 2019-02-26 |
| 10191382 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Michael Layh | 2019-01-29 |
| 10151929 | Illumination optical unit for projection lithography and hollow waveguide component therefor | Thomas Stammler | 2018-12-11 |
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Michael Patra, Johannes Wangler, Manfred Maul, Damian Fiolka +1 more | 2018-12-04 |
| 10133183 | Optical component | Michael Patra, Paul Buettner, Willi Heintel, Henner Baitinger | 2018-11-20 |
| 10088754 | Illumination system for microlithography | Axel Scholz, Frank Schlesener, Nils Haverkamp, Vladimir Davydenko, Michael Gerhard +8 more | 2018-10-02 |
| 10061203 | Beam distributing optical device and associated unit, system and apparatus | Michael Patra, Thomas Korb | 2018-08-28 |
| 10018917 | Illumination optical unit for EUV projection lithography | Stig Bieling, Martin Endres, Michael Patra, Johannes Wangler | 2018-07-10 |
| 10012907 | Optical system of a microlithographic projection exposure apparatus | Thomas Korb | 2018-07-03 |