Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255040 | Multi-beam particle beam system and method for operating same | Dirk Zeidler, Christof Riedesel, Arne Thoma, Georgo Metalidis, Joerg Jacobi +4 more | 2025-03-18 |
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Jan Horn, Andy Zott, Markus Deguenther | 2022-03-01 |
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Christof Riedesel, Erik Essers | 2022-02-01 |
| 10854423 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Christof Riedesel, Erik Essers | 2020-12-01 |
| 10838307 | Apparatus and method for operating an apparatus | Markus Holz | 2020-11-17 |
| 10514619 | Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system | Markus Holz, Jan Horn | 2019-12-24 |
| 10261424 | Lithography apparatus and method for operating a lithography apparatus | Udo Dinger, Markus Holz | 2019-04-16 |
| 10139618 | Multi-mirror array | Jan Horn, Stefan Tuerk, Oscar Franciscus Jozephus Noordman | 2018-11-27 |