Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11262660 | Image sensor, position sensor device, lithography system, and method for operating an image sensor | Jan Horn, Ulrich Bihr, Markus Deguenther | 2022-03-01 |
| 10509330 | Method and device for characterizing a wafer patterned using at least one lithography step | Hans-Michael Stiepan, Ulrich Mantz | 2019-12-17 |