Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362129 | Particle beam column | Björn Gamm | 2025-07-15 |
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Ingo Mueller, Arne Thoma, Joerg Jacobi +2 more | 2025-06-24 |
| 12300461 | Particle beam device, method for operating the particle beam device and computer program product | Björn Gamm | 2025-05-13 |
| 11276547 | Charged particle optical apparatus for through-the-lens detection of particles | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2022-03-15 |
| 11239054 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Christof Riedesel | 2022-02-01 |
| 10984977 | Particle beam system and method for operating a particle beam system | — | 2021-04-20 |
| 10861670 | Charged particle optical apparatus for through-the-lens detection of particles | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2020-12-08 |
| 10854423 | Multi-beam particle beam system | Yanko Sarov, Jan Horn, Ulrich Bihr, Christof Riedesel | 2020-12-01 |
| 10522321 | Charged particle optical apparatus for through-the-lens detection of particles | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2019-12-31 |
| 10068744 | Charged particle optical apparatus for through-the lens detection of particles | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2018-09-04 |
| 9741528 | Charged particle optical apparatus having a selectively positionable differential pressure module | Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean | 2017-08-22 |
| 8431894 | Electron beam device | Gerd Benner, Volker Drexel | 2013-04-30 |
| 6969854 | Arrangement for holding a particle beam apparatus | Michael Trunz | 2005-11-29 |
| 6949744 | Electron microscopy system, electron microscopy method and focusing system for charged particles | Michael Steigerwald | 2005-09-27 |
| 6707041 | Detector for a scanning electron microscope with variable pressure and scanning electron microscope with such detector | — | 2004-03-16 |
| 6590210 | Scanning electron microscope | — | 2003-07-08 |