YS

Yanko Sarov

CG Carl Zeiss Multisem Gmbh: 3 patents #10 of 34Top 30%
CG Carl Zeiss Smt Gmbh: 2 patents #466 of 1,189Top 40%
Overall (All Time): #777,421 of 4,157,543Top 20%
6
Patents All Time

Issued Patents All Time

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
12255040 Multi-beam particle beam system and method for operating same Dirk Zeidler, Christof Riedesel, Arne Thoma, Georgo Metalidis, Joerg Jacobi +4 more 2025-03-18
11239054 Multi-beam particle beam system Jan Horn, Ulrich Bihr, Christof Riedesel, Erik Essers 2022-02-01
10854423 Multi-beam particle beam system Jan Horn, Ulrich Bihr, Christof Riedesel, Erik Essers 2020-12-01
10761317 Device for swiveling a mirror element with two degrees of swiveling freedom Markus Hauf 2020-09-01
10101507 Mirror device Markus Holz, Fabian Haacker, Mark Christof Wengler, Markus Hauf 2018-10-16
8689359 Apparatus and method for investigating surface properties of different materials Ivo Rangelow, Tzvetan Ivanov, Burkhard Volland, Teodor Gotszalk, Miroslaw Woszczyna +1 more 2014-04-01