Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409167 | Method for illuminating an object field of a projection exposure system | Martin Endres, Johannes Eisenmenger, Stig Bieling, Markus Hauf, Lars Wischmeier | 2019-09-10 |
| 10101507 | Mirror device | Yanko Sarov, Markus Holz, Mark Christof Wengler, Markus Hauf | 2018-10-16 |
| 9874819 | Mirror array | Stig Bieling, Markus Hauf, Lars Wischmeier, Martin Endres, Johannes Eisenmenger | 2018-01-23 |
| 9851555 | Optical component | Markus Holz, Benjamin Sigel, Jan Horn, Benedikt Knauf | 2017-12-26 |