Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964673 | Optical system with aperture device having plurality of aperture elements | Sascha Bleidistel | 2018-05-08 |
| 9851555 | Optical component | Markus Holz, Jan Horn, Benedikt Knauf, Fabian Haacker | 2017-12-26 |
| 9030644 | Projection exposure apparatus for semiconductor lithography including an actuator system | Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber | 2015-05-12 |