Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Bernhard Geuppert +2 more | 2018-02-13 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Bernhard Geuppert +2 more | 2017-01-31 |
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Bernhard Geuppert +2 more | 2015-08-11 |
| 9030644 | Projection exposure apparatus for semiconductor lithography including an actuator system | Benjamin Sigel, Andreas Bertele, Peter Kloesch, Jochen Weber | 2015-05-12 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Bernhard Geuppert +2 more | 2012-10-30 |
| 7548387 | Optical imaging device | Thorsten Rassel, Erich Merz | 2009-06-16 |
| 7265919 | Flange assembly of an optical system | Johannes Rau | 2007-09-04 |