Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314177 | Supporting an optical element | Jens Kugler, Alexander Kharitonov | 2022-04-26 |
| 10890850 | Optical imaging arrangement with actively adjustable metrology support units | Stefan Hembacher, Jens Kugler | 2021-01-12 |
| 10635003 | Lithography system and method | — | 2020-04-28 |
| 10599051 | Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus | Stefan Hembacher, Erik Loopstra, Jens Kugler | 2020-03-24 |
| 10416570 | Optical imaging arrangement with a piezoelectric device | Jens Kugler, Stefan Hembacher, Michaela Schmid, Burkhard Corves, Martin Riedel +5 more | 2019-09-17 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10042271 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Rolf Freimann, Paul Kaufmann | 2018-08-07 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2018-02-13 |
| 9696630 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Erik Roelof Loopstra, Marco Hendrikus Hermanus Oude Nijhuis, Rodolfo Guglielmi Rabe +2 more | 2017-07-04 |
| 9696639 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Rolf Freimann, Paul Kaufmann | 2017-07-04 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2017-01-31 |
| 9551944 | Method for replacing objective parts | Guido Limbach, Harald Woelfle, Peter Deufel | 2017-01-24 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9410662 | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus | Rodolfo Rabe, Ulrich Schoenhoff | 2016-08-09 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Juergen Fischer, Ulrich Schoenhoff, Hans Butler, Robertus Johannes Marinus De Jongh | 2016-04-05 |
| 9134632 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Yim-Bun Patrick Kwan, Erik Roelof Loopstra, Marco Hendrikus Hermanus Oude Nijhuis +2 more | 2015-09-15 |
| 9110388 | Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related method | Sascha Bleidistel | 2015-08-18 |
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2015-08-11 |
| 9001304 | Projection exposure system for microlithography with a measurement device | Ulrich Mueller, Joachim Stuehler, Oswald Gromer, Rolf Freimann, Paul Kaufmann | 2015-04-07 |
| 8705185 | Optical element | Johannes Rau, Armin Schoeppach | 2014-04-22 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2013-09-24 |
| 8441747 | Optical module with minimized overrun of the optical element | Willi Heintel, Hagen Federau, Joachim Hartjes, Harald Kirchner, Ulrich Bingel +1 more | 2013-05-14 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2012-10-30 |