Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416570 | Optical imaging arrangement with a piezoelectric device | Jens Kugler, Stefan Hembacher, Bernhard Geuppert, Burkhard Corves, Martin Riedel +5 more | 2019-09-17 |
| 9904175 | EUV imaging apparatus | Jens Kugler, Stefan Hembacher | 2018-02-27 |