Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287587 | Damping arrangement for vibration damping of an element in an optical system | Marwene Nefzi, David Schoenen, Jens Kugler | 2025-04-29 |
| 11526089 | Compensation of creep effects in an imaging device | Marwene Nefzi, Stefan Troeger, Ralf Zweering, Konrad Carl Steimer | 2022-12-13 |
| 11281114 | Projection exposure apparatus for semiconductor lithography | Jens Kugler, Mark Feygin, Stefan Xalter, Bernhard Gellrich | 2022-03-22 |
| 11169359 | Method for positioning a component of an optical system | Pascal Marsollek | 2021-11-09 |
| 11092897 | Method for producing a mirror as an optical component for an optical system of a projection exposure apparatus for projection lithography | — | 2021-08-17 |
| 10989897 | Optical element for the beam guidance of imaging light in projection lithography | Marwene Nefzi | 2021-04-27 |
| 10890850 | Optical imaging arrangement with actively adjustable metrology support units | Bernhard Geuppert, Jens Kugler | 2021-01-12 |
| 10684551 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2020-06-16 |
| 10599051 | Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus | Erik Loopstra, Jens Kugler, Bernhard Geuppert | 2020-03-24 |
| 10416570 | Optical imaging arrangement with a piezoelectric device | Jens Kugler, Michaela Schmid, Bernhard Geuppert, Burkhard Corves, Martin Riedel +5 more | 2019-09-17 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2019-06-11 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2018-07-24 |
| 9904175 | EUV imaging apparatus | Jens Kugler, Michaela Schmid | 2018-02-27 |
| 9817322 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Bernhard Gellrich, Jens Kugler, Sascha Bleidistel | 2017-11-14 |
| 9810996 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2017-11-07 |
| 9766550 | Actuators and microlithography projection exposure systems and methods using the same | Ulrich Weber, Armin Schoeppach | 2017-09-19 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9696518 | Position manipulator for an optical component | — | 2017-07-04 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2016-04-19 |
| 9250417 | Optical arrangement in a microlithographic projection exposure apparatus | Dirk Schaffer, Jens Kugler | 2016-02-02 |
| 9175948 | Optical module with a measuring device | Armin Schoeppach, Guido Limbach, Jens Kugler | 2015-11-03 |
| 9046794 | Cleaning module, EUV lithography device and method for the cleaning thereof | Dieter Kraus, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Koehler, Almut Czap +2 more | 2015-06-02 |
| 8902401 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2014-12-02 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2013-09-24 |