Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810996 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2017-11-07 |
| 8902401 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2014-12-02 |
| 8891172 | Optical element and method | Eric Eva, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge +5 more | 2014-11-18 |
| 8508854 | Optical element and method | Eric Eva, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge +5 more | 2013-08-13 |
| 8363206 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2013-01-29 |
| 8325322 | Optical correction device | Markus Hauf, Ulrich Schoenhoff, Michael Thier, Tilmann Heil, Ole Fluegge +7 more | 2012-12-04 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel +4 more | 2011-08-02 |
| 7830611 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel, Arif Kazi +4 more | 2010-11-09 |