Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703770 | Compensation of creep effects in an imaging device | Eylem Bektas Knauf, Marwene Nefzi, Ralf Zweering, Konrad Carl Steimer, Yim-Bun Patrick Kwan | 2023-07-18 |
| 10838306 | Optical system, in particular for a microlithographic projection exposure apparatus | — | 2020-11-17 |
| 10185221 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2019-01-22 |
| 10108097 | Arrangement for manipulating the position of an element | Eylem Bektas, Markus Hauf | 2018-10-23 |
| 9841682 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2017-12-12 |
| 9568837 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2017-02-14 |
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Rodolfo Rabe, Norbert Muehlberger, Dirk Eicher +1 more | 2016-09-20 |
| 9410662 | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus | Bernhard Geuppert, Rodolfo Rabe | 2016-08-09 |
| 9304404 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Juergen Fischer, Bernhard Geuppert, Hans Butler, Robertus Johannes Marinus De Jongh | 2016-04-05 |
| 9081292 | Arrangement for actuating an element in a projection exposure apparatus | Markus Hauf | 2015-07-14 |
| 8891172 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ole Fluegge +5 more | 2014-11-18 |
| 8786826 | Arrangement for actuating an element in a microlithographic projection exposure apparatus | Sascha Bleidistel, Juergen Fischer | 2014-07-22 |
| 8508854 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ole Fluegge +5 more | 2013-08-13 |
| 8325322 | Optical correction device | Markus Hauf, Payam Tayebati, Michael Thier, Tilmann Heil, Ole Fluegge +7 more | 2012-12-04 |