Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Ulrich Schoenhoff, Norbert Muehlberger, Dirk Eicher +1 more | 2016-09-20 |
| 9410662 | Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus | Bernhard Geuppert, Ulrich Schoenhoff | 2016-08-09 |