Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996012 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Florian Bach | 2018-06-12 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Thorsten Rassel, Armin Werber +1 more | 2016-12-06 |
| 9448384 | Arrangement for mounting an optical element | Michael Erath, Florian Bach, Ulrich Schoenhoff, Rodolfo Rabe, Dirk Eicher +1 more | 2016-09-20 |
| 9411241 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Armin Werber, Florian Bach | 2016-08-09 |
| 9341807 | Gravitation compensation for optical elements in projection exposure apparatuses | Thorsten Rassel, Armin Schoeppach, Juergen Fischer, Matthias Orth | 2016-05-17 |
| 9025128 | Actuator including magnet for a projection exposure system and projection exposure system including a magnet | Armin Werber, Almut Czap, Juergen Fischer | 2015-05-05 |
| 9013676 | Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithography | Armin Werber, Florian Bach | 2015-04-21 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Thorsten Rassel, Armin Werber +1 more | 2014-11-11 |
| 8854603 | Gravitation compensation for optical elements in projection exposure apparatuses | Thorsten Rassel, Armin Schoeppach, Juergen Fischer, Matthias Orth | 2014-10-07 |