Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298675 | Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damper | Philipp Gaida, Florian Herold | 2025-05-13 |
| 11537052 | Weight-force compensation device | — | 2022-12-27 |
| 10809636 | Optical arrangement, in particular lithography system | Bernhard Gellrich, Ralf Zweering, Charles Seviour, Jens Prochnau, Marwene Nefzi +3 more | 2020-10-20 |
| 10761436 | Optical arrangement, in particular lithography system, with a transport lock | Ralf Zweering, Steffen Fritzsche, Hendrik Wagner, Florian Ahles, Jens Prochnau +2 more | 2020-09-01 |
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Jasper Wesselingh, Ansgar Holle, Stefan Troeger, Alexander Vogler | 2020-02-25 |
| 10254664 | Device for aligning a component | — | 2019-04-09 |
| 9448384 | Arrangement for mounting an optical element | Florian Bach, Ulrich Schoenhoff, Rodolfo Rabe, Norbert Muehlberger, Dirk Eicher +1 more | 2016-09-20 |
| 6829048 | Flame atomization device | — | 2004-12-07 |
| 6618139 | Torch glassware for use with inductively coupled plasma-optical emission spectrometer | — | 2003-09-09 |
| 6448565 | Unit for a plasma atomizer device with plasma gas-supply means, sample atomizer means and sample injection means | — | 2002-09-10 |