Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11274914 | Measuring assembly for the frequency-based determination of the position of a component | Matthias Manger, Andreas Koeniger | 2022-03-15 |
| 10571816 | Assembly in a microlithographic projection exposure apparatus | Jasper Wesselingh, Michael Erath, Ansgar Holle, Stefan Troeger | 2020-02-25 |
| 10303065 | Arrangement for actuating at least one optical element in an optical system | Markus Hauf | 2019-05-28 |
| 9887613 | Lithography device with eddy-current brake | Markus Hauf | 2018-02-06 |
| 9665011 | Arrangement for actuating at least one optical element in an optical system | Markus Hauf | 2017-05-30 |
| 9513452 | Damping device | Klaus Rief, Andreas Frommeyer, Alan L. Brydon | 2016-12-06 |