Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581813 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Toralf Gruner +1 more | 2017-02-28 |
| 9513452 | Damping device | Alexander Vogler, Klaus Rief, Alan L. Brydon | 2016-12-06 |
| 9069263 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Toralf Gruner +1 more | 2015-06-30 |
| 7777963 | Method for improving the imaging properties of a projection objective, and such a projection objective | Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Toralf Gruner +1 more | 2010-08-17 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7540983 | Method of producing aspherical optical surfaces | Ernst-Dieter Knohl, Hermann Schubert | 2009-06-02 |
| 7448763 | Optical subassembly and projection objective in semiconductor lithography | G Fraser Morrison, Wolfgang Keller, Yim-Bun Patrick Kwan, Harald Kirchner, Willi Heintel | 2008-11-11 |