Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513452 | Damping device | Alexander Vogler, Andreas Frommeyer, Alan L. Brydon | 2016-12-06 |
| 8879046 | Method for moving an optical element of a projection exposure apparatus for microlithography | Karl-Eugen Aubele, Sven Ulmer, Marco Jassmann | 2014-11-04 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8199315 | Projection objective for semiconductor lithography | — | 2012-06-12 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7609464 | Holding device for an optical element with support force equalization | Yuanbo Kong | 2009-10-27 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |
| 5839527 | Multi-axle steering system for vehicles | Dieter Elser | 1998-11-24 |
| 5799259 | Vehicle with steerable front and rear wheels | Dieter Elser, Walter Kogel | 1998-08-25 |