Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879046 | Method for moving an optical element of a projection exposure apparatus for microlithography | Sven Ulmer, Klaus Rief, Marco Jassmann | 2014-11-04 |
| 8810934 | Positioning method for an optical arrangement of a projection illumination system | Erich Merz, Thorsten Rassel | 2014-08-19 |
| 8570676 | Optical assembly | Hermann Bieg, Yim-Bun Patrick Kwan, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2013-10-29 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2013-08-20 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2011-06-14 |
| 7929227 | Optical assembly | Hermann Bieg, Yim-Bun Patrick Kwan, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2011-04-19 |
| 7791826 | Optical assembly | Hermann Bieg, Yim-Bun Patrick Kwan, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2010-09-07 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2010-05-04 |
| 7684131 | Method and a device for positioning an element in an optical system | — | 2010-03-23 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Erich Merz, Raoul Reiner +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2007-12-04 |
| 6759670 | Method for dynamic manipulation of a position of a module in an optical system | — | 2004-07-06 |
| 5526576 | Coordinate measurement machine having a probe head and an electronic system for processing probe signals | Anton Fuchs, Eugen Aubele, Rudi Kern, Rudolf Rogele, Walter Puntigam | 1996-06-18 |
| 5018280 | Method and device for the operation of a workpiece-contacting probe head of the switching type | Eckhard Enderle, Hans-Peter Aehnelt, Michael Wirth | 1991-05-28 |
| 4785545 | Means for simultaneously connecting a plurality of switch-type probe heads to the measurement arm of a coordinate-measuring machine | — | 1988-11-22 |
| 4769763 | Control for coordinate measuring instruments | Gerhard Trieb, Karl Schepperle | 1988-09-06 |
| 4758720 | Method and means for measuring guidance errors at one or more points along the length of a displacement-measuring system | Helmut Lenhof, Peter Vogt | 1988-07-19 |