Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879046 | Method for moving an optical element of a projection exposure apparatus for microlithography | Karl-Eugen Aubele, Klaus Rief, Marco Jassmann | 2014-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8879046 | Method for moving an optical element of a projection exposure apparatus for microlithography | Karl-Eugen Aubele, Klaus Rief, Marco Jassmann | 2014-11-04 |