Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804501 | Optical component | Severin Waldis, Caglar Ataman, Roger Marc Bostock, Jian Deng, Sebastian Lani +1 more | 2017-10-31 |
| 9116440 | Optical module for guiding a radiation beam | Markus Hauf, Severin Waldis, Wilfried Noell, Yves Petremend, Lothar Kulzer +1 more | 2015-08-25 |
| 8879046 | Method for moving an optical element of a projection exposure apparatus for microlithography | Karl-Eugen Aubele, Sven Ulmer, Klaus Rief | 2014-11-04 |