Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078271 | Optical component | Matthias Orth, Roger Marc Bostock, Jian Deng, Sebastian Lani, Benedikt Knauf +1 more | 2018-09-18 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9804501 | Optical component | Marco Jassmann, Caglar Ataman, Roger Marc Bostock, Jian Deng, Sebastian Lani +1 more | 2017-10-31 |
| 9791691 | Mirror array | Sebastian Lani, Benedikt Knauf, Jian Deng, Roger Marc Bostock | 2017-10-17 |
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Armin Werber | 2017-01-03 |
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Armin Werber, Berndt Warm | 2016-12-20 |
| 9274434 | Light modulator and illumination system of a microlithographic projection exposure apparatus | Armin Werber, Florian Bach | 2016-03-01 |
| 9116440 | Optical module for guiding a radiation beam | Markus Hauf, Wilfried Noell, Yves Petremend, Marco Jassmann, Lothar Kulzer +1 more | 2015-08-25 |
| 8797507 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Armin Werber, Berndt Warm | 2014-08-05 |
| 8767176 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Armin Werber | 2014-07-01 |
| 8717531 | Mirror for guiding a radiation bundle | Florian Bach, Daniel Benz, Armin Werber, Wilfried Noell, Dirk Heinrich Ehm +2 more | 2014-05-06 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |