Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10590694 | Glass door apparatus | Alexandra Steigerwald | 2020-03-17 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Martin Endres, Ralf Stuetzle, Jens Ossmann +6 more | 2013-11-19 |