Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690203 | Method for adjusting an illumination setting | Joerg Zimmermann, Paul Graeupner, Olaf Conradi | 2017-06-27 |
| 9588434 | Catoptric illumination system for microlithography tool | Jens Ossmann, Martin Endres | 2017-03-07 |
| 9310692 | Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus | Martin Endres, Jens Ossmann, Michael Layh | 2016-04-12 |
| 9304400 | Illumination system for EUV microlithography | Michael Layh, Damian Fiolka, Martin Endres, Holger Weigand | 2016-04-05 |
| 9235137 | Illumination optical unit for microlithography | Damian Fiolka | 2016-01-12 |
| 9110378 | Illumination optical system for projection lithography | Jens Ossmann, Martin Endres | 2015-08-18 |
| 8937708 | Illumination optics for microlithography | Martin Endres, Jens Ossmann | 2015-01-20 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Jens Ossmann +6 more | 2013-11-19 |
| 8253925 | Catoptric illumination system for microlithography tool | Jens Ossmann, Martin Endres | 2012-08-28 |
| 8179519 | Adjusting device with a laser light source and a reflector for aligning a microlithography projection exposure installation | — | 2012-05-15 |
| 8174677 | Illumination optical system for microlithography | Jens Ossmann, Martin Endres | 2012-05-08 |
| 7910900 | Collector for an illumination system | Udo Dinger | 2011-03-22 |