Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304400 | Illumination system for EUV microlithography | Michael Layh, Ralf Stuetzle, Damian Fiolka, Martin Endres | 2016-04-05 |
| 9002189 | Long-range optical device having image stabilization and improved pivot detection | Philipp Jester, Dirk Jahn | 2015-04-07 |
| 6642525 | Particle-optical component and system comprising a particle-optical component | Oliver Kienzle | 2003-11-04 |