Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671608 | Illumination system for EUV lithography | Martin Endres | 2017-06-06 |
| 9588434 | Catoptric illumination system for microlithography tool | Martin Endres, Ralf Stuetzle | 2017-03-07 |
| 9310692 | Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus | Ralf Stuetzle, Martin Endres, Michael Layh | 2016-04-12 |
| 9110378 | Illumination optical system for projection lithography | Martin Endres, Ralf Stuetzle | 2015-08-18 |
| 8937708 | Illumination optics for microlithography | Martin Endres, Ralf Stuetzle | 2015-01-20 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |
| 8253925 | Catoptric illumination system for microlithography tool | Martin Endres, Ralf Stuetzle | 2012-08-28 |
| 8227770 | EUV illumination system | Martin Endres | 2012-07-24 |
| 8174677 | Illumination optical system for microlithography | Martin Endres, Ralf Stuetzle | 2012-05-08 |
| 7626770 | Illumination system with zoom objective | Wolfgang Singer | 2009-12-01 |
| 7586113 | EUV illumination system | Martin Endres | 2009-09-08 |