Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Olaf Dittmann, Toralf Gruner, Gundula Weiss, Andras G. Major +5 more | 2018-04-17 |
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Manfred Maul, Markus Deguenther +4 more | 2017-02-21 |
| 9217930 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Manfred Maul, Markus Deguenther +4 more | 2015-12-22 |
| 8634060 | Method for a multiple exposure, microlithography projection exposure installation and a projection system | — | 2014-01-21 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2013-08-27 |
| 8395756 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Manfred Maul, Markus Deguenther +4 more | 2013-03-12 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2011-02-01 |
| 7875418 | Method for a multiple exposure, microlithography projection exposure installation and a projection system | — | 2011-01-25 |
| 7561253 | Method for a multiple exposure, microlithography projection exposure installation and a projection system | — | 2009-07-14 |