Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196986 | Method for producing a substrate for an optical element | Andreas Schmehl | 2025-01-14 |
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Kenneth Weible, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2017-02-21 |
| 9541685 | Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type | Holger Kierey, Andre Bresan | 2017-01-10 |
| 9217930 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Kenneth Weible, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2015-12-22 |
| 8976927 | Substrate for mirrors for EUV lithography | Claudia Ekstein, Johannes Lippert, Holger Maltor, Martin Weiser, Udo Dinger | 2015-03-10 |
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler, Andre Bresan +6 more | 2013-08-27 |
| 8395756 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Kenneth Weible, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2013-03-12 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler, Andre Bresan +6 more | 2011-02-01 |