Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575414 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2017-02-21 |
| 9217930 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2015-12-22 |
| 9025131 | Optical beam deflecting element, illumination system including same, and related method | Daniel Runde, Florian Doll, Reinhard Voelkel, Gundula Weiss, Michael Gerhard | 2015-05-05 |
| 8395756 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Ralf Scharnweber, Manfred Maul, Markus Deguenther +4 more | 2013-03-12 |