Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146135 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul +1 more | 2018-12-04 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Andras G. Major +5 more | 2018-04-17 |
| 9052606 | Microlithographic projection exposure apparatus | Andras G. Major, Manfred Maul, Jochen Hetzler | 2015-06-09 |
| 9025131 | Optical beam deflecting element, illumination system including same, and related method | Daniel Runde, Florian Doll, Reinhard Voelkel, Kenneth Weible, Michael Gerhard | 2015-05-05 |
| 8891057 | Microlithographic projection exposure apparatus | Michael Layh, Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul +1 more | 2014-11-18 |
| 8724086 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Michael Layh, Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul +1 more | 2014-05-13 |
| 8259392 | Method of producing a diffractive optical element and diffractive optical element produced by such a method | Harald Volkenandt | 2012-09-04 |
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller +3 more | 2011-11-29 |