Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332043 | Measurement method for interferometrically determining a surface shape | Hans-Michael Stiepan, Sebastian Fuchs | 2025-06-17 |
| 12235097 | Diffractive optical element for a test interferometer | Alexander Winkler, Martin Scheid, Hans-Michael Stiepan, Frank Eisert | 2025-02-25 |
| 12105427 | Method and device for correcting a telecentricity error of an imaging device | Susanne Toepfer | 2024-10-01 |
| 11879720 | Device and method for characterizing the surface shape of a test object | Holger Jennewein | 2024-01-23 |
| 11774237 | Method for calibrating a measuring apparatus | Stefan Schulte, Matthias Dreher | 2023-10-03 |
| 11199396 | Compensation optical system for an interferometric measuring system | Stefan Schulte | 2021-12-14 |
| 10527403 | Measuring device for interferometric determination of a shape of an optical surface | — | 2020-01-07 |
| 10502545 | Measuring method and measuring arrangement for an imaging optical system | Ulrich Wegmann, Hans-Michael Stiepan | 2019-12-10 |
| 10422718 | Test device and method for testing a mirror | Hans-Michael Stiepan, Sebastian Fuchs | 2019-09-24 |
| 10359703 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Rolf Freimann, Bernd Doerband | 2019-07-23 |
| 10337850 | Interferometric measuring arrangement | Sebastian Fuchs, Hans-Michael Stiepan, Karl-Heinz Schuster | 2019-07-02 |
| 10303068 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2019-05-28 |
| 10101667 | Method for aligning a mirror of a microlithographic projection exposure apparatus | Rolf Freimann, Bernd Doerband | 2018-10-16 |
| 10054426 | Mask inspection system for inspecting lithography masks | Joachim Schroeder | 2018-08-21 |
| 9709902 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2017-07-18 |
| 9606339 | Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus | Ralf Mueller, Wolfgang Singer | 2017-03-28 |
| 9442393 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2016-09-13 |
| 9052606 | Microlithographic projection exposure apparatus | Andras G. Major, Manfred Maul, Gundula Weiss | 2015-06-09 |
| 9046792 | Projection exposure tool for microlithography and method for microlithographic imaging | Aksel Goehnermeier | 2015-06-02 |
| 8982325 | Microlithographic projection exposure apparatus | Michael Totzeck, Aksel Goehnermeier, Wolfgang Singer, Helmut Beierl, Heiko Feldmann +1 more | 2015-03-17 |
| 8617774 | Method and calibration mask for calibrating a position measuring apparatus | Norbert Kerwien | 2013-12-31 |
| 8436982 | Projection objective for microlithography | Helmut Beierl, Heiko Feldmann, Michael Totzeck | 2013-05-07 |
| 8107054 | Microlithographic projection exposure apparatus | Michael Totzeck, Aksel Goehnermeier, Wolfgang Singer, Helmut Beierl, Heiko Feldmann +1 more | 2012-01-31 |
| 8089634 | Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure | Frank Schillke, Stefan Schulte, Rolf Freimann, Bernd Doerband | 2012-01-03 |
| 7848031 | Hologram and method of manufacturing an optical element using a hologram | Susanne Beder, Heiko Feldmann | 2010-12-07 |