Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235097 | Diffractive optical element for a test interferometer | Alexander Winkler, Martin Scheid, Hans-Michael Stiepan, Jochen Hetzler | 2025-02-25 |
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Armin Schoeppach, Hans-Juergen Mann, Yim-Bun Patrick Kwan | 2016-09-06 |
| 7557902 | Projection objective | Udo Dinger, Stefan Koehler, Andreas Ochse, Johannes Zellner, Martin Lowisch +1 more | 2009-07-07 |
| 7481543 | Mirror for use in a projection exposure apparatus | Udo Dinger, Siegfried Stacklies, Martin Weiser, Guenther Seitz | 2009-01-27 |
| 7118449 | Method of manufacturing an optical element | Udo Dinger, Siegfried Stacklies, Martin Weiser, Guenther Seitz | 2006-10-10 |
| 7031428 | Substrate material for X-ray optical components | Udo Dinger, Martin Weiser, Konrad Knapp, Ina Mitra, Hans Morian | 2006-04-18 |