Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7679806 | Method for making optical elements for microlithography, the lens systems obtained by the method and their uses | Gunther Wehrhan, Regina Martin, Lutz Parthier, Joerg Staeblein, Martin Letz +2 more | 2010-03-16 |
| 7031428 | Substrate material for X-ray optical components | Udo Dinger, Frank Eisert, Martin Weiser, Ina Mitra, Hans Morian | 2006-04-18 |
| 5999254 | Supporting plate for a photomask in an apparatus for making a microchip | Volker Seibert, Ulf Schniering | 1999-12-07 |