Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578972 | EUV collector for use in an EUV projection exposure apparatus | Holger Kierey | 2020-03-03 |
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Boris Bittner, Norbert Wabra, Martin von Hodenberg, Sonja Schneider, Ricarda Schoemer +4 more | 2016-06-21 |
| 9304408 | Projection objective for microlithography | Hans-Juergen Mann, Martin Endres | 2016-04-05 |
| 9195145 | Microlithographic imaging optical system including multiple mirrors | Hans-Juergen Mann, Armin Schoeppach | 2015-11-24 |
| 9182578 | Imaging optical system and illumination optical system | Hans-Juergen Mann, Aurelian Dodoc, Marco Pretorius, Christoph Menke, Wilhelm Ulrich +1 more | 2015-11-10 |
| 9057964 | Imaging optics and projection exposure installation for microlithography with an imaging optics | Hans-Juergen Mann, Aurelian Dodoc, Claus Zahlten, Christoph Menke, Marco Pretorius +2 more | 2015-06-16 |
| 8873122 | Microlithographic imaging optical system including multiple mirrors | Hans-Juergen Mann, Armin Schoeppach | 2014-10-28 |
| 8629972 | Projection objective for microlithography | Hans-Juergen Mann, Martin Endres | 2014-01-14 |
| 8027022 | Projection objective | Hans-Juergen Mann, Wilhelm Ulrich | 2011-09-27 |
| 7999917 | Illumination system and microlithographic projection exposure apparatus including same | Hans-Juergen Mann | 2011-08-16 |
| 7697211 | Symmetrical objective having four lens groups for microlithography | David Shafer, Aurelian Dodoc, Heiko Feldmann, Wilhelm Ulrich, Holger Walter +3 more | 2010-04-13 |
| 7557902 | Projection objective | Udo Dinger, Frank Eisert, Stefan Koehler, Andreas Ochse, Martin Lowisch +1 more | 2009-07-07 |
| 7524072 | Optical component, comprising a material with a predetermined homogeneity of thermal expansion | Timo Laufer | 2009-04-28 |
| 7477355 | Projection exposure apparatus and projection optical system | Jean-Noel Fehr, Hans-Juergen Mann | 2009-01-13 |