Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9057964 | Imaging optics and projection exposure installation for microlithography with an imaging optics | Hans-Juergen Mann, Johannes Zellner, Aurelian Dodoc, Christoph Menke, Marco Pretorius +2 more | 2015-06-16 |