Issued Patents All Time
Showing 1–25 of 119 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Wilhelm Ulrich, Erik Loopstra, David Shafer | 2019-11-19 |
| 10408765 | Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit | — | 2019-09-10 |
| 10007187 | Imaging optical system | — | 2018-06-26 |
| 9910193 | Reflective optical element and EUV lithography appliance | Johann Trenkler, Udo Nothelfer | 2018-03-06 |
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Alexander Epple | 2017-09-26 |
| 9720329 | Projection objective of a microlithographic projection exposure apparatus | Hartmut Enkisch, Stephan Muellender, Rolf Freimann | 2017-08-01 |
| 9639004 | Imaging optics and projection exposure installation for microlithography with an imaging optics | — | 2017-05-02 |
| 9568845 | Mirror for use in a microlithography projection exposure apparatus | Martin Rocktaeschel, Hartmut Enkisch, Franz-Josef Stickel, Oliver Natt, Sascha Migura | 2017-02-14 |
| 9568832 | Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods | — | 2017-02-14 |
| 9541841 | Imaging optical system and projection exposure installation for microlithography including same | Alexander Epple | 2017-01-10 |
| 9535337 | Imaging optics, microlithography projection exposure apparatus having same and related methods | David Shafer | 2017-01-03 |
| 9529276 | Microlithography projection exposure apparatus having at least two operating states | Winfried Kaiser | 2016-12-27 |
| 9500958 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | David Shafer | 2016-11-22 |
| 9482961 | Microlithography projection optical system, tool and method of production | Wilhelm Ulrich | 2016-11-01 |
| 9482794 | Magnifying imaging optical unit and metrology system including same | — | 2016-11-01 |
| 9465300 | Catoptric objectives and systems using catoptric objectives | Wilhelm Ulrich, Marco Pretorius | 2016-10-11 |
| 9459539 | Imaging optical unit for a projection exposure apparatus | Christoph Menke, Susanne Beder | 2016-10-04 |
| 9442386 | Imaging optics | — | 2016-09-13 |
| 9436101 | Optical arrangement and microlithographic projection exposure apparatus including same | Armin Schoeppach, Frank Eisert, Yim-Bun Patrick Kwan | 2016-09-06 |
| 9366968 | Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods | — | 2016-06-14 |
| 9316918 | EUV collector | Wolfgang Singer | 2016-04-19 |
| 9304408 | Projection objective for microlithography | Johannes Zellner, Martin Endres | 2016-04-05 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | David Shafer, Wilhelm Ulrich | 2016-04-05 |
| 9298100 | Imaging optical system | — | 2016-03-29 |
| 9285515 | Imaging optical system and projection exposure system including the same | Wilheim Ulrich, Stephan Muellender, Hartmut Enkisch | 2016-03-15 |