Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360293 | Catadioptric projection lens and method for producing same | Michael Grupp, Hendrik Wagner | 2022-06-14 |
| 9568845 | Mirror for use in a microlithography projection exposure apparatus | Hartmut Enkisch, Franz-Josef Stickel, Oliver Natt, Hans-Juergen Mann, Sascha Migura | 2017-02-14 |