Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684551 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2020-06-16 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2019-06-11 |
| 10222704 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2019-03-05 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2018-07-24 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2017-08-29 |
| 9703206 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2017-07-11 |
| 9568845 | Mirror for use in a microlithography projection exposure apparatus | Martin Rocktaeschel, Hartmut Enkisch, Franz-Josef Stickel, Hans-Juergen Mann, Sascha Migura | 2017-02-14 |
| 9341957 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2016-05-17 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2016-04-19 |
| 9298097 | Projection exposure apparatus for EUV microlithography and method for microlithographic exposure | Marc Bienert, Heiko Feldmann, Aksel Goehnermeier, Johannes Ruoff | 2016-03-29 |
| 9217931 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2015-12-22 |
| 9116441 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann, Manfred Maul, Christian Hettich | 2015-08-25 |
| 8467033 | Method for operating an illumination system of a microlithographic projection exposure apparatus | Frank Schlesener | 2013-06-18 |
| 8169594 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann, Manfred Maul, Christian Hettich | 2012-05-01 |