Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040103 | Imaging optical arrangement to image an object illuminated by X-rays | Heiko Feldmann | 2024-07-16 |
| 11935228 | Method to acquire a 3D image of a sample structure | Ramani Pichumani, Christoph Graf Vom Hagen, Jens Timo Neumann, Thomas Matthew Gregorich | 2024-03-19 |
| 11927500 | Method and device for characterizing the surface shape of an optical element | Steffen SIEGLER, Alexander Wolf, Michael Carl, Toralf Gruner, Thomas Schicketanz | 2024-03-12 |
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |
| 11817231 | Detection system for X-ray inspection of an object | Juan Atkinson Mora, Thomas A. Case, Heiko Feldmann, Christoph Graf Vom Hagen, Thomas Matthew Gregorich +1 more | 2023-11-14 |
| 11422470 | Imaging optical unit for EUV microlithography | Hubert Holderer | 2022-08-23 |
| 11137688 | Optical system for transferring original structure portions of a lithography mask, projection optical unit for imaging an object field in which at least one original structure portion of the lithography mask is arrangeable, and lithography mask | Michael Patra | 2021-10-05 |
| 11119413 | Imaging optical unit for imaging an object field into an image field | Susanne Beder, Hans-Juergen Rostalski, Alexander Wolf | 2021-09-14 |
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Sascha Perlitz, Hans-Jurgen Mann | 2020-04-28 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Ralf Müller, Susanne Beder, Ulrich Matejka, Hans-Jurgen Mann, Jens Timo Neumann | 2020-03-31 |
| 10591825 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Norbert Wabra, Ricarda Schoemer +1 more | 2020-03-17 |
| 10386297 | Method and apparatus for examining an element of a photolithographic mask for the EUV range | Jörg Frederik Blumrich | 2019-08-20 |
| 10345570 | Device for optical examination of a specimen, method for examining a specimen and method for transferring a device into an operation-ready state | Wolfgang Singer, Aksel Goehnermeier, Guenter Rudolph, Christian Dietrich, Rong Dong | 2019-07-09 |
| 10274649 | Mirror and related EUV systems and methods | Heiko Feldmann | 2019-04-30 |
| 10191386 | Imaging optical unit for EUV projection lithography | Josef Rapp | 2019-01-29 |
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Sascha Perlitz, Hans-Jurgen Mann | 2018-09-04 |
| 10048592 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Norbert Wabra, Ricarda Schoemer +1 more | 2018-08-14 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Manfred Maul, Christoph Hennerkes, Daniel Kraehmer | 2018-04-24 |
| 9933710 | Projection exposure method and projection exposure apparatus | Stephan Andre, Daniel Golde, Toralf Gruner | 2018-04-03 |
| 9835953 | Imaging optical unit for EUV projection lithography | Josef Rapp | 2017-12-05 |
| 9798249 | Method and apparatus for compensating at least one defect of an optical system | Vladimir Dmitriev, Ingo Saenger, Frank Schlesener, Markus Mengel | 2017-10-24 |
| 9785052 | Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors | Jens Timo Neumann, Joerg Zimmermann, Dirk Hellweg, Dirk Juergens | 2017-10-10 |
| 9678439 | Mirror | Ingo Saenger, Martin Endres, Thomas Eisenmann | 2017-06-13 |
| 9658533 | Arrangement of a mirror | Heiko Feldmann, Michael Layh | 2017-05-23 |
| 9645503 | Collector | Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Martin Meier, Frank Schlesener +2 more | 2017-05-09 |