Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Shao-Chi Wei +2 more | 2024-02-27 |
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Hans-Jurgen Mann | 2020-04-28 |
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Hans-Jurgen Mann | 2018-09-04 |
| 9605946 | Method for characterizing a structure on a mask and device for carrying out said method | — | 2017-03-28 |
| 9297994 | Grating-assisted autofocus device and autofocusing method for an imaging device | Michael Arnz, Dirk Seidel | 2016-03-29 |
| 9213003 | Method for characterizing a structure on a mask and device for carrying out said method | — | 2015-12-15 |