Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345864 | Apparatus and method for manipulating a focus of excitation light on or in a sample and microscope | Ivo Vellekoop, Tzu-Lun Wang, Bahareh Mastiani, Kai Wicker | 2025-07-01 |
| 12335614 | Method and device for determining the optimal position of the focal plane for examining a specimen by microscopy | Markus Sticker, Lutz Schaefer | 2025-06-17 |
| 12307334 | Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography process | Dirk Seidel, Alexander Freytag, Christian Wojek, Susanne Töpfer, Carsten Schmidt | 2025-05-20 |
| 12111579 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Alexander Freytag, Dirk Seidel, Carsten Schmidt | 2024-10-08 |
| 12001145 | Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model | Alexander Freytag, Dirk Seidel, Carsten Schmidt, Thomas Scheruebl | 2024-06-04 |
| 11892769 | Method for detecting an object structure and apparatus for carrying out the method | Beat Marco Mout, Dirk Seidel, Ulrich Matejka | 2024-02-06 |
| 11774859 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Alexander Freytag, Dirk Seidel, Carsten Schmidt | 2023-10-03 |
| 11442263 | Method and devices for displaying stereoscopic images | Lars Stoppe, Tanja Teuber, Lars Omlor, Kai Wicker, Enrico Geissler +1 more | 2022-09-13 |
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Markus Koch, Lars Stoppe, Beat Marco Mout | 2021-08-03 |
| 11054305 | Method and device for beam analysis | Matthias Manger, Matus Kalisky, Lars Stoppe | 2021-07-06 |
| 10788748 | Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out | Thomas Thaler, Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Mame Kouna Top-Diallo | 2020-09-29 |
| 10670387 | Determining the position of an object in the beam path of an optical device | Lars Stoppe, Markus Sticker | 2020-06-02 |
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2020-04-28 |
| 10620417 | Method for generating a reflection-reduced contrast image and corresponding device | Lars Stoppe, Thomas MILDE, Johannes Winterot | 2020-04-14 |
| 10605654 | Method and device for beam analysis | Matthias Manger, Matus Kalisky, Lars Stoppe | 2020-03-31 |
| 10475168 | Method for generating a result image and optical device | Lars Stoppe, Wolfgang Singer | 2019-11-12 |
| 10338368 | Phase contrast imaging | Lars Stoppe | 2019-07-02 |
| 10330913 | Method and device for imaging an object | Lars Stoppe | 2019-06-25 |
| 10191292 | Apparatus and method for light modulation | Matthias Wald | 2019-01-29 |
| 10175468 | Method for generating a contrast image of an object structure and apparatuses relating thereto | Lars Stoppe | 2019-01-08 |
| 10151576 | Confocally chromatic sensor for determining coordinates of a measurement object | Nils Haverkamp | 2018-12-11 |
| 10108085 | Method for localizing defects on substrates | Jan Hendrik Peters, Jörg Frederik Blumrich, Dirk Seidel | 2018-10-23 |
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2018-09-04 |