Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11892769 | Method for detecting an object structure and apparatus for carrying out the method | Dirk Seidel, Christoph Husemann, Ulrich Matejka | 2024-02-06 |
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Markus Koch, Christoph Husemann, Lars Stoppe | 2021-08-03 |