Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |
| 11899358 | Method for measuring photomasks | Dmitry Simakov, Steffen Steinert, Dirk Beyer, Ute Buttgereit | 2024-02-13 |
| 10987666 | Metering apparatus | Rolf Gueller, Michael Schneider, Markus Schindler | 2021-04-27 |
| 10788748 | Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out | Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Mame Kouna Top-Diallo, Christoph Husemann | 2020-09-29 |
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Frank, Ulrich Matejka, Markus Deguenther +2 more | 2020-06-30 |
| 10578975 | Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography | Joachim Welte, Kujan Gorhad, Vladimir Dmitriev, Ute Buttgereit, Thomas Scheruebl +1 more | 2020-03-03 |
| 10539865 | Method and device for determining an OPC model | Holger Seitz, Ute Buttgereit, Thomas Trautzsch | 2020-01-21 |
| 10265701 | Substance container | Rolf Gueller, Michael Schneider, Markus Schindler | 2019-04-23 |
| 9869640 | Method and device for examining a mask | Thomas Trautzsch, Ute Buttgereit | 2018-01-16 |
| 9535244 | Emulation of reproduction of masks corrected by local density variations | Holger Seitz, Ulrich Matejka, Thomas Rademacher | 2017-01-03 |
| 5837235 | Process for regenerating bone and cartilage | Werner H. Mueller | 1998-11-17 |
| 5658343 | Areal implant | Hans Jörg Häuselmann, Mats Paulsson, Peter Bittmann | 1997-08-19 |
| 5637496 | Device and method for conveying and separating a suspension with biological cells or micro-organisms | Gerhard Klement | 1997-06-10 |