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CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
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Patent #TitleCo-InventorsDate
10788748 Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out Thomas Thaler, Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Christoph Husemann 2020-09-29